C05200 - SEMI C52 - Specification for the Shelf Life of a Specialty Gas Revision:SEMI C52-0301 (Reapproved 0312) - Superseded This Document is intended to

This Document is intended to provide the minimum criteria for the analysis of uncertainty associated with preparation and use of gravimetric gas mixtures used for calibrating analytical instruments to determine whether various SEMI impurity specification are satisfied

This edition was approved for publication by the global Audits and Reviews Subcommittee on April 15

The purpose of this Document is to standardize requirements for xylene used in the semiconductor industry and to document testing procedures to support this Standard

注意：　本文書は、2006年、全面的に書き換えられた。

then the validation should be repeated after verifying the physical measurement upon which the prediction is based and any other parameters deemed suspect

C05200 - SEMI C52 - Specification for the Shelf Life of a Specialty Gas Revision:SEMI C52-0301 (Reapproved 0312) - Superseded This Document is intended toThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 13, 2017. Available at www. semiviews. org and www. semi. org in June 2018; originally published March 2001; previously published March 2012. The purpose of this Document is to define terminology and to recommend minimum periods for the shelf lives of specialty gases. It is