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SEMI F63-1016 (technical revision)
2-95 (Withdrawn 1109) — High-Speed SECS Message Services General Session (HSMS-GS)
3 The VPD model specified in this Specification is used in conjunction with the Sensor/Actuator Network Common Device Model (CDM) to completely describe the vacuum pump as it appears from the network interface
SEMI C69-1015 (Reapproved 1220)
SEMI E147 — Guide for Equipment Data Acquisition (EDA)
E14500 - SEMI E145 - XMLにおける測定単位記号に関する分類 StdPbc-0615 SEMI F63-1016 (technical revision)global Information and Control Committee2011912global Audits and Reviews Subcommittee201111www. semiviews. orgwww. semi. org20063 SEMIXMLXMLSEMI E5SEMI E6SIXML Referenced SEMI Standards SEMI E5 SEMI Equipment Communications Standard 2 Message Content (SECS II) SEMI E6 Guide for Equipment Semiconductor Installation Documentation SEMI E30 Generic Model for Communications and Control of Manufacturing Equipment (GEM) SEMI E121 Guide for Style and Usage of