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SEMI PV61-0115 (Reapproved 0121)
영문원본을 우선으로 해야함을 알려드립니다
E This standard was editorially modified in October 2009 to correct editorial errors
This Standard establishes implementation guidelines for the measurement of visual appearance
performance
M02900 - SEMI M29 - 300 mmシッピングボックスの仕様 StdPbc-0521 SEMI PV61-0115 (Reapproved 0121)Global Silicon Wafer CommitteeJapanese Silicon Wafer Committee200388Japanese Regional Standards Committee20039www. semi. org2003111996 IC300 mm Referenced SEMI Standards SEMI E1. 9 Provisional Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers SEMI E57 Provisional Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers
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