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orgで，そして2007年11月にCD-ROMで入手可能となる。初版は2005年2月発行，前版は2006年7月に発行された。
SEMI E21-91 (first published)
The purpose of this Safety Guideline is to provide performance and design principles and test methods and criteria for exhaust ventilation
the test methods are to be applied to the assembled and interconnected gas delivery components and their associated mounting panel (backplane)
mapping) of SDM object structure and behavior onto the network for each SEMI specified SDM (referred to as the ‘SDM mapping’)
E03800 - SEMI E38 - Cluster Tool Module Communications (CTMC) Revision:SEMI E38-1296 (Withdrawn 0307) - Withdrawn orgで，そして2007年11月にCD-ROMで入手可能となる。初版は2005年2月発行，前版は2006年7月に発行された。This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on November 21, 2006. It was available at www. semi. org in February 2007 and on CD ROM in March 2007. Originally published in 1995; previously published December 1996. NOTICE: This document was balloted and approved for withdrawl in 2007. Cluster tools fulfill a need for